Research on the Properties of Ta2O5 Optical Films Prepared with APS Plasma Assisted Deposition

论文编号:  
作者:   Pan Yong-gang; Liu Zheng; Liu Wen-cheng; Li Mian; Zhang Si-bao; Luo Chang-xin; Zhang Chun-juan
刊物名称:   SEVENTH ASIA PACIFIC CONFERENCE ON OPTICS MANUFACTURE (APCOM 2021)
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论文题目:   Research on the Properties of Ta2O5 Optical Films Prepared with APS Plasma Assisted Deposition
发表年度:   2022
卷:   12166
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