Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation

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作者:   Wang, Xuewen; Theogene, Barayavuga; Mei, Huanhuan; Zhang, Jianwei; Huang, Chenchen; Ren, Xiaoying; Xu, Muxun
刊物名称:   FERROELECTRICS
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论文题目:   Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation
发表年度:   2023
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