Theoretical and experimental investigation of secondary electron emission characteristics of ALD-ZnO conductive films

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作者:   Zhu, Xiangping; Guo, Junjiang; Cao, Weiwei; Liu, Lutao; Zhang, Guangwei; Sun, Xin; Zhao, Wei; Si, JinHai
刊物名称:   JOURNAL OF APPLIED PHYSICS
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论文题目:   Theoretical and experimental investigation of secondary electron emission characteristics of ALD-ZnO conductive films
发表年度:   2023
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