Enhanced Adhesion of Copper Films on Fused Silica Glass Substrate by Plasma Pre-Treatment

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作者:   Yang, Liqing; Yang, Xianli; Gao, Fei; Guan, Yongmao; Wan, Rui; Wang, Pengfei
刊物名称:   MATERIALS
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论文题目:   Enhanced Adhesion of Copper Films on Fused Silica Glass Substrate by Plasma Pre-Treatment
发表年度:   2023
卷:   16
期:   14
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